Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10462850 | Method of manufacturing ceramic sintered body, ceramic sintered body, and ceramic heater | Satoshi Hirano, Toshihiro Tachikawa, Junichi Miyahara | 2019-10-29 |
| 10290529 | Heater unit | Naoya Aikawa | 2019-05-14 |
| 10279441 | Method of manufacturing plate with passage, plate with passage, temperature adjustment plate, cold plate, and shower plate | — | 2019-05-07 |
| 10276410 | Substrate support device | Toshihiro Tachikawa, Junichi Miyahara, Kazuhiro Yonekura, Go Takahara, Jun Futakuchiya +1 more | 2019-04-30 |