Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10462850 | Method of manufacturing ceramic sintered body, ceramic sintered body, and ceramic heater | Satoshi Hirano, Toshihiro Tachikawa, Toshihiko Hanamachi | 2019-10-29 |
| 10276410 | Substrate support device | Toshihiro Tachikawa, Kazuhiro Yonekura, Toshihiko Hanamachi, Go Takahara, Jun Futakuchiya +1 more | 2019-04-30 |