Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515778 | Secondary particle detection system of scanning electron microscope | Sumio Sasaki, Susumu Takashima, Makoto Kato, Kazufumi Kubota, Yuichiro Yamazaki | 2019-12-24 |
| 10360115 | Monitoring device, fault-tolerant system, and control method | — | 2019-07-23 |