Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10478867 | Treatment liquid supply device using syringe, and wet treatment device | Shiro Hara, Akio Kobayashi, Takeshi Umino, Sonoko Matsuda | 2019-11-19 |
| 10431446 | Wet processing apparatus | Shiro Hara, Shinichi Ikeda, Akihiro Goto, Hiroshi Amano | 2019-10-01 |
| 10304675 | System for integrating preceding steps and subsequent steps | Michihiro Inoue, Shiro Hara, Fumito IMURA, Arami Saruwatari | 2019-05-28 |
| 10286426 | Columnar laminar flow generation device and method for generating columnar laminar flows | Shuuji Okuda, Shiro Hara, Sho Takeuchi, Yoshihisa Sensu, Takahiro Ito | 2019-05-14 |
| 10186489 | Process substrate with crystal orientation mark, method of detecting crystal orientation, and reading device of crystal orientation mark | Shiro Hara, Shinichi Ikeda | 2019-01-22 |