Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10478867 | Treatment liquid supply device using syringe, and wet treatment device | Sommawan Khumpuang, Akio Kobayashi, Takeshi Umino, Sonoko Matsuda | 2019-11-19 |
| 10431446 | Wet processing apparatus | Sommawan Khumpuang, Shinichi Ikeda, Akihiro Goto, Hiroshi Amano | 2019-10-01 |
| 10332768 | Compact manufacturing device, and inter-device transport system for production line | Hitoshi Maekawa | 2019-06-25 |
| 10304675 | System for integrating preceding steps and subsequent steps | Michihiro Inoue, Fumito IMURA, Arami Saruwatari, Sommawan Khumpuang | 2019-05-28 |
| 10286426 | Columnar laminar flow generation device and method for generating columnar laminar flows | Shuuji Okuda, Sommawan Khumpuang, Sho Takeuchi, Yoshihisa Sensu, Takahiro Ito | 2019-05-14 |
| 10240350 | Free access floor structure, and manufacturing apparatus and carrier apparatus adapted for floor structure | Tadanari Anpo | 2019-03-26 |
| 10186489 | Process substrate with crystal orientation mark, method of detecting crystal orientation, and reading device of crystal orientation mark | Sommawan Khumpuang, Shinichi Ikeda | 2019-01-22 |