Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10296554 | Correction of angular error of plane-of-incidence azimuth of optical metrology device | Ye Feng, Daniel Thompson, Yan Zhang | 2019-05-21 |
| 10274367 | Deconvolution to reduce the effective spot size of a spectroscopic optical metrology device | Amit Shachaf, Michael Elad | 2019-04-30 |