Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10296554 | Correction of angular error of plane-of-incidence azimuth of optical metrology device | Pedro Vagos, Ye Feng, Daniel Thompson | 2019-05-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10296554 | Correction of angular error of plane-of-incidence azimuth of optical metrology device | Pedro Vagos, Ye Feng, Daniel Thompson | 2019-05-21 |