Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488751 | Pellicle, production method thereof, exposure method | Kazuo Kohmura, Daiki Taneichi, Yosuke Ono, Hisako ISHIKAWA, Atsushi Okubo +2 more | 2019-11-26 |
| 10261411 | Pellicle film, pellicle frame, pellicle, and method for producing same | Atsushi Okubo, Yosuke Ono, Kazuo Kohmura, Yasuhisa Fujii, Nobuko MATSUMOTO | 2019-04-16 |