Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488751 | Pellicle, production method thereof, exposure method | Kazuo Kohmura, Yosuke Ono, Hisako ISHIKAWA, Tsuneaki Biyajima, Atsushi Okubo +2 more | 2019-11-26 |
| 10216081 | Pellicle frame, pellicle and method of manufacturing the same, original plate for exposure and method of manufacturing the same, exposure device, and method of manufacturing semiconductor device | Kazuo Kohmura, Yosuke Ono, Yasuyuki Sato, Toshiaki Hirota | 2019-02-26 |