Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10494261 | Inorganic polysilazane resin | Takashi Fujiwara, Ralf GROTTENMUELLER, Takashi Kanda | 2019-12-03 |
| 10451974 | Rinse composition, a method for forming resist patterns and a method for making semiconductor devices | Kazuma Yamamoto, Yuriko Matsuura, Tomoyasu YASHIMA | 2019-10-22 |
| 10191380 | Composition for resist patterning and method for forming pattern using same | Kazuma Yamamoto | 2019-01-29 |