Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10451974 | Rinse composition, a method for forming resist patterns and a method for making semiconductor devices | Yuriko Matsuura, Tomoyasu YASHIMA, Tatsuro Nagahara | 2019-10-22 |
| 10191380 | Composition for resist patterning and method for forming pattern using same | Tatsuro Nagahara | 2019-01-29 |