Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10436717 | Compositional optical emission spectroscopy for detection of particle induced arcs in a fabrication process | Thomas R. Omstead, Deepak Vedhachalam | 2019-10-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10436717 | Compositional optical emission spectroscopy for detection of particle induced arcs in a fabrication process | Thomas R. Omstead, Deepak Vedhachalam | 2019-10-08 |