Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468595 | Semiconductor device structures including silicon-containing dielectric materials | Cole S. Franklin | 2019-11-05 |
| 10436717 | Compositional optical emission spectroscopy for detection of particle induced arcs in a fabrication process | Ke-Hung Chen, Deepak Vedhachalam | 2019-10-08 |