Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10487392 | Double-layer system comprising a partially absorbing layer, and method and sputter target for producing said layer | Martin Schlott, Albert Kastner, Jens Wagner | 2019-11-26 |
| 10347472 | Zirconium oxide based sputtering target | Christoph Simons, Andreas Herzog, Anna Schott | 2019-07-09 |