Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10475630 | Metal oxide target and method for producing said metal oxide target | Carl Christoph Stahr, Jens Wagner | 2019-11-12 |
| 10347472 | Zirconium oxide based sputtering target | Andreas Herzog, Markus Schultheis, Anna Schott | 2019-07-09 |