Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460960 | Gas panel apparatus and method for reducing exhaust requirements | Ashish Kumar, Niladri Roy, Ramachandra Murthy Gunturi, Andreas Neuber, Stephen C. Wolgast | 2019-10-29 |
| 10283320 | Processing chamber hardware fault detection using spectral radio frequency analysis | Sathyendra Ghantasala, Hyun-Ho Doh | 2019-05-07 |
| 10185313 | Eco-efficiency characterization tool | Mark Denome, Ashish Kumar, Vijai Thangamany, Somil KAPADIA, Ching-Hong Hsieh | 2019-01-22 |