Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10283320 | Processing chamber hardware fault detection using spectral radio frequency analysis | Sathyendra Ghantasala, Vijayakumar C. Venugopal | 2019-05-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10283320 | Processing chamber hardware fault detection using spectral radio frequency analysis | Sathyendra Ghantasala, Vijayakumar C. Venugopal | 2019-05-07 |