Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10256108 | Atomic layer etching of AL2O3 using a combination of plasma and vapor treatments | Andreas Fischer, Thorsten Lill, John D. Boniface | 2019-04-09 |
| 10229837 | Control of directionality in atomic layer etching | Andreas Fischer, Thorsten Lill | 2019-03-12 |