Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10256108 | Atomic layer etching of AL2O3 using a combination of plasma and vapor treatments | Andreas Fischer, Thorsten Lill, Richard Janek | 2019-04-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10256108 | Atomic layer etching of AL2O3 using a combination of plasma and vapor treatments | Andreas Fischer, Thorsten Lill, Richard Janek | 2019-04-09 |