RO

Rainer Obweger

Lam Research: 2 patents #90 of 444Top 25%
Overall (2019): #129,197 of 560,194Top 25%
2
Patents 2019

Issued Patents 2019

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10490426 Method and apparatus for processing wafer-shaped articles Andreas Gleissner, Thomas Wirnsberger, Franz Kumnig, Alessandro Baldaro, Christian Thomas Fischer +4 more 2019-11-26
10269615 Apparatus for treating surfaces of wafer-shaped articles Ulrich Tschinderle, Andreas Gleissner, Thomas Wirnsberger 2019-04-23