Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490426 | Method and apparatus for processing wafer-shaped articles | Rainer Obweger, Thomas Wirnsberger, Franz Kumnig, Alessandro Baldaro, Christian Thomas Fischer +4 more | 2019-11-26 |
| 10269615 | Apparatus for treating surfaces of wafer-shaped articles | Ulrich Tschinderle, Thomas Wirnsberger, Rainer Obweger | 2019-04-23 |
| 10167552 | Spin chuck with rotating gas showerhead | Markus JUNK, Bhaskar BANDARAPU | 2019-01-01 |