Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438847 | Manganese barrier and adhesion layers for cobalt | Chiukin Steven Lai, Raashina Humayun, Michal Danek, Kaihan Ashtiani | 2019-10-08 |
| 10283404 | Selective deposition of WCN barrier/adhesion layer for interconnect | Megha Rathod, Chiukin Steven Lai, Raashina Humayun | 2019-05-07 |
| 10242879 | Methods and apparatus for forming smooth and conformal cobalt film by atomic layer deposition | Raashina Humayun | 2019-03-26 |
| 10229826 | Systems and methods for forming low resistivity metal contacts and interconnects by reducing and removing metallic oxide | Raihan M. Tarafdar, Shruti Vivek Thombare, Raashina Humayun, Chiukin Steven Lai | 2019-03-12 |