Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10485085 | Extreme ultraviolet light sensor unit and extreme ultraviolet light generation device | Hiroshi Someya, Takuya Ishii | 2019-11-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10485085 | Extreme ultraviolet light sensor unit and extreme ultraviolet light generation device | Hiroshi Someya, Takuya Ishii | 2019-11-19 |