Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481354 | Structure of connection between optical unit and optical path tube | Yukio Watanabe, Yuki Kawashima, Yuto TANAKA | 2019-11-19 |
| 10485085 | Extreme ultraviolet light sensor unit and extreme ultraviolet light generation device | Hisashi Nara, Takuya Ishii | 2019-11-19 |