Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10496078 | Substrate processing system, substrate processing apparatus and management device | Kazuyoshi Yamamoto, Osamu Ueda | 2019-12-03 |
| 10289781 | Management apparatus, substrate processing system and non-transitory computer-readable recording medium | Toshiro Koshimaki, Hideto Shimizu, Kayoko Yashiki, Kazuyoshi Yamamoto, Nobuhisa Makino | 2019-05-14 |
| 10211110 | Method of manufacturing semiconductor device | Tsukasa Kamakura | 2019-02-19 |