Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10289781 | Management apparatus, substrate processing system and non-transitory computer-readable recording medium | Toshiro Koshimaki, Kazuhide Asai, Hideto Shimizu, Kazuyoshi Yamamoto, Nobuhisa Makino | 2019-05-14 |