Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10489902 | Inspection apparatus, semiconductor device manufacturing system including the same, and method of manufacturing a semiconductor device using the same | Kwang Soo Kim, Byeonghwan Jeon, Youngduk Kim | 2019-11-26 |
| 10474133 | Inspection device for inspecting wafer and method of inspecting wafer using the same | Janghee Lee, Yoo-jin Jeong, Byeonghwan Jeon | 2019-11-12 |
| 10199282 | Inspection apparatus and method of manufacturing semiconductor device using the same | Sung Won Park, Jeong-Su HA, Kwang Soo Kim, Byeong Kyu Cha | 2019-02-05 |