Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10365639 | Feature selection and automated process window monitoring through outlier detection | Shabnam Ghadar, Sina Jahanbin, Himanshu Vajaria | 2019-07-30 |
| 10290088 | Wafer and lot based hierarchical method combining customized metrics with a global classification methodology to monitor process tool condition at extremely high throughput | Himanshu Vajaria, Tommaso Torelli, Mohan Mahadevan | 2019-05-14 |