Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10324045 | Surface defect inspection with large particle monitoring and laser power control | Steve (Yifeng) Cui, Chunsheng Huang, Chunhai Wang, Bret Whiteside, Anatoly Romanovsky +2 more | 2019-06-18 |
| 10241217 | System and method for reducing radiation-induced false counts in an inspection system | Ximan Jiang, Anatoly Romanovsky, Stephen Biellak, Mous Tatarkhanov | 2019-03-26 |
| 10215712 | Method and apparatus for producing and measuring dynamically focused, steered, and shaped oblique laser illumination for spinning wafer inspection system | Bret Whiteside, Anatoly Romanovsky | 2019-02-26 |