Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10431472 | Gas composition for dry etching and dry etching method | Korehito KATO, Tetsuya FUKASAWA, Yoshihiko Iketani | 2019-10-01 |
| 10287499 | Etching gas composition for silicon compound, and etching method | Korehito KATO | 2019-05-14 |