Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10431472 | Gas composition for dry etching and dry etching method | Yoshinao Takahashi, Korehito KATO, Tetsuya FUKASAWA | 2019-10-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10431472 | Gas composition for dry etching and dry etching method | Yoshinao Takahashi, Korehito KATO, Tetsuya FUKASAWA | 2019-10-01 |