Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10199281 | Substrate features for inductive monitoring of conductive trench depth | Wei Lu, Zhihong Wang, Wen-Chiang Tu, Hassan G. Iravani, Boguslaw A. Swedek +2 more | 2019-02-05 |