Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10451971 | Composition for forming underlayer and method for forming underlayer therewith | Masato Suzuki, Hiroshi Yanagita, Go Noya, Shigemasa Nakasugi | 2019-10-22 |
| 10268117 | Top-layer membrane formation composition and method for forming resist pattern using same | Masato Suzuki, Xiaowei Wang, Tetsuo Okayasu, Georg Pawlowski | 2019-04-23 |