Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10268117 | Top-layer membrane formation composition and method for forming resist pattern using same | Masato Suzuki, Xiaowei Wang, Yusuke Hama, Georg Pawlowski | 2019-04-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10268117 | Top-layer membrane formation composition and method for forming resist pattern using same | Masato Suzuki, Xiaowei Wang, Yusuke Hama, Georg Pawlowski | 2019-04-23 |