Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10403492 | Integration of materials removal and surface treatment in semiconductor device fabrication | Michael X. Yang, Hua Chung, Haochen Li, Ting Xie, Qi Zhang | 2019-09-03 |
| 10354883 | Surface treatment of silicon or silicon germanium surfaces using organic radicals | Michael X. Yang, Hua Chung | 2019-07-16 |
| 10269574 | Surface treatment of carbon containing films using organic radicals | Michael X. Yang, Hua Chung | 2019-04-23 |