Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522474 | Staircase etch control in forming three-dimensional memory device | Zhenyu Lu, Lidong Song, Yongna Li, Feng Pan, Dan Liu +2 more | 2019-12-31 |
| 10515975 | Method for forming dual-deck channel hole structure of three-dimensional memory device | Qian Tao, Yushi Hu, Zhenyu Lu, Li Xiao, Jun Chen +4 more | 2019-12-24 |