Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522474 | Staircase etch control in forming three-dimensional memory device | Zhenyu Lu, Lidong Song, Feng Pan, Xiaowang Dai, Dan Liu +2 more | 2019-12-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522474 | Staircase etch control in forming three-dimensional memory device | Zhenyu Lu, Lidong Song, Feng Pan, Xiaowang Dai, Dan Liu +2 more | 2019-12-31 |