Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10513772 | Process for passivating dielectric films | Eva Tois, Robert Huggare, Jan Willem Maes, Vladimir Machkaoutsan, Dieter Pierreux | 2019-12-24 |
| 10428419 | Combination CVD/ALD method, source and pulse profile modification | Hannu Huotari | 2019-10-01 |
| 10428421 | Selective deposition on metal or metallic surfaces relative to dielectric surfaces | Suvi Haukka, Raija H. Matero, Elina Färm | 2019-10-01 |
| 10280519 | Thermal atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2019-05-07 |
| 10283319 | Atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2019-05-07 |
| 10273584 | Thermal atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2019-04-30 |