Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10280519 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Marko Tuominen | 2019-05-07 |
| 10283319 | Atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Marko Tuominen | 2019-05-07 |
| 10273584 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Marko Tuominen | 2019-04-30 |
| 10211308 | NbMC layers | Timo Asikainen, Robert Brennan Milligan | 2019-02-19 |
| 10190213 | Deposition of metal borides | Kiran Shrestha, Suvi Haukka | 2019-01-29 |