Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10501847 | Apparatus and method for generating a vapor for a CVD or PVD device | Birgit Irmgard Beccard, Claudia Cremer, Karl-Heinz Trimborn, Andy EICHLER, Andreas Poqué | 2019-12-10 |
| 10472718 | Temperature-controlled gas supply line with dilution gas flows supplied at multiple locations | Markus Gersdorff, Martin Dauelsberg, Baskar Pagadala Gopi | 2019-11-12 |
| 10323322 | Gas inlet element of a CVD reactor with weight-reduced gas outlet plate | Baskar Pagadala Gopi, Markus Gersdorff | 2019-06-18 |
| 10267768 | Device and method for determining the concentration of a vapor by means of an oscillating body sensor | Birgit Irmgard Beccard, Claudia Cremer, Karl-Heinz Trimborn, Andy EICHLER, Nael Al Ahmad | 2019-04-23 |