Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10501847 | Apparatus and method for generating a vapor for a CVD or PVD device | Michael D. Long, Birgit Irmgard Beccard, Claudia Cremer, Karl-Heinz Trimborn, Andy EICHLER | 2019-12-10 |