Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10394138 | System and method for control of a workpiece and a chuck | Paul Derek Coon | 2019-08-27 |
| 10295911 | Extreme ultraviolet lithography system that utilizes pattern stitching | Daniel Gene Smith, David M. Williamson | 2019-05-21 |
| 10254654 | Microelectromechanical mirror assembly | Shane R. Palmer | 2019-04-09 |