Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10416562 | Increasing and controlling sensitivity of non-linear metallic thin-film resists | — | 2019-09-17 |
| 10310387 | Dynamic patterning method that removes phase conflicts and improves pattern fidelity and CDU on a two phase-pixelated digital scanner | Julia A. Sakamoto, Donis Flagello | 2019-06-04 |
| 10254654 | Microelectromechanical mirror assembly | Michael Binnard | 2019-04-09 |