Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10260863 | Interferometric displacement sensor for integration into machine tools and semiconductor lithography systems | Martin Zech | 2019-04-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10260863 | Interferometric displacement sensor for integration into machine tools and semiconductor lithography systems | Martin Zech | 2019-04-16 |