Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10505470 | Stick-slip drive, especially piezo-actuated inertial drive | Jan Schoebel, Thomas Pickert | 2019-12-10 |
| 10260863 | Interferometric displacement sensor for integration into machine tools and semiconductor lithography systems | Klaus Thurner | 2019-04-16 |