Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510570 | Systems, apparatus, and methods for purging a substrate carrier at a factory interface | Subramaniam V. Iyer, Dharma Ratnam Srichurnam, Devendrappa Holeyannavar, Douglas MacLeod, Naveen Kumar +2 more | 2019-12-17 |