Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510570 | Systems, apparatus, and methods for purging a substrate carrier at a factory interface | Subramaniam V. Iyer, Dharma Ratnam Srichurnam, Douglas MacLeod, Kenneth Carpenter, Naveen Kumar +2 more | 2019-12-17 |
| 10185298 | Smart tool monitoring system | Subramaniam V. Iyer | 2019-01-22 |