Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497567 | Method of enhanced selectivity of hard mask using plasma treatments | Hailong Zhou, Yangchung Lee, Chain Lee, Hui Sun | 2019-12-03 |
| 10497578 | Methods for high temperature etching a material layer using protection coating | Hailong Zhou, Gene S. Lee, Abhijit Patil, Shan Jiang, Akhil Mehrotra | 2019-12-03 |