Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497567 | Method of enhanced selectivity of hard mask using plasma treatments | Hailong Zhou, Yangchung Lee, Chain Lee, Jonathan Kim | 2019-12-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497567 | Method of enhanced selectivity of hard mask using plasma treatments | Hailong Zhou, Yangchung Lee, Chain Lee, Jonathan Kim | 2019-12-03 |