Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497598 | Electrostatic chuck and method of making same | Richard A. Cooke, Wolfram Neff, Jakub Rybczynski, Michael J. Hanagan, Wade A. Krull | 2019-12-03 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497598 | Electrostatic chuck and method of making same | Richard A. Cooke, Wolfram Neff, Jakub Rybczynski, Michael J. Hanagan, Wade A. Krull | 2019-12-03 |